Service Line: 04 Imaging and Characterization
VASE Research Spectroscopic Ellipsometer
The VASE ellipsometer is used for non-destructive characterization of thin film and bulk materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more. It is typically used for measuring thin film thickness and optical constants (n and k). It can also acquire intensity data to measure reflectance and transmission. The VASE has the highest precision and accuracy of any spectroscopic ellipsometer.
Wide Spectral Range: 193 to 1700 nm.
WVASE32®: most sophisticated ellipsometric data analysis software
Automated Angle of Incidence
Focusing optics for 200um spot size
-Reflected and transmitted ellipsometry
-Polarized transmission and reflection
Manufacturer: J. A. Woollam
Grigg Hall, Third Floor Room: CleanRoom Bay Number: 4