Service Line: 02 Material Deposition and Etching
Advanced Oxide Etcher (AOE)
The ST Systems AOE employs fluorine plasma chemistries in ICP and/or RIE modes to etch dielectrics including SiO 2 and Si 3 N 4 . SiO 2 may be etched at a rate of up to ~270 nm/min. with selectivity to photo-resist up to 5:1.
SF6, O2, C4F8, H2, CHF3, He
Coil - 3 Kw at 13.56 MHz
Platen – 600 w at 13.56 MHz
The AOE may be used to etch optical structures such as gratings and waveguides. Processes are currently under development to etch nano -imprinted dielectric materials.
Manufacturer: ST Systems
Grigg Hall, Third Floor Room: CleanRoom Bay Number: 3