GCA 5X Stepper

Service Line: 01 Lithography

GCA 5X Stepper

  • 5X reduction projection lithography tool

  • G-Line 436 nm wavelength

  • 4" 1mm thick wafers, silicone and fused silica

  • Single wafer chuck



Manufacturer: GCA
Model: 5X

Contact:
Scott Williams
704-687-8126
scotwill@uncc.edu

Tool Location:

Floor: 3rd             Room: CleanRoom             Bay: 2