VASE Research Spectroscopic Ellipsometer
| Service Line: 04 Imaging and Characterization | ||
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VASE Research Spectroscopic |
The VASE ellipsometer is used for non-destructive characterization of thin film and bulk materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more. It is typically used for measuring thin film thickness and optical constants (n and k). It can also acquire intensity data to measure reflectance and transmission. The VASE has the highest precision and accuracy of any spectroscopic ellipsometer. Specifications: Wide Spectral Range: 193 to 1700 nm. WVASE32®: most sophisticated ellipsometric data analysis software Automated Angle of Incidence Focusing optics for 200um spot size Acquire: -Reflected and transmitted ellipsometry -Polarized transmission and reflection intensity depolarization -Anisotropic measurements -Mueller Matrix -Scatterometry Manufacturer: J. A. Woollam Contact: |
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| Tool Location: | ||
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| Floor3rd | Room: CleanRoom | Bay: 4 |
