GCA 5X Stepper

 

Service Line: 01 Lithography


GCA 5X Stepper

  • 5X reduction projection lithography tool

  • G-Line 436 nm wavelength

  • 4" 1mm thick wafers, silicone and fused silica

  • Single wafer chuck



Manufacturer: GCA
Model: 5X

Contact:
Bob Hudgins
704-687-8125
rhudgins@uncc.edu

Tool Location:
Floor: 3rd Room: CleanRoom  Bay: 2