Lithography

• The Raith 150 E-beam Lithography System
• Quintel Mask Alignment System
• Imprio Molecular Imprint System
• Laurell Spin Processor
• Brewer Science Spin Processor
• Brewer Science Hot Plate
• GCA 5X Stepper

Materials Deposition and Etching

• Rapid Thermal Process System
• AJA Sputtering Tool
• AJA Ion Mill System
• III-V ICP System
• AOE Dielectric Etch System
• ASE ICP Deep Silicon Etch System
• PECVD
• Lesker Evaporator

Packaging

• Dicing Saw MicroAutomation
• Flip Chip Bonder
• Scribe and Break Tool
• Wire Bonder K&S
• Digital Wedge Bonding System K&S

Imaging and Characterization

• X-Ray Diffraction (XRD)
• JEOL SEM w/EDAX
• Veeco Nonoscope IV SPM Controller
• VASE Research Spectroscopic Ellipsometer
• Olympus Microscope MX51
• Olympus Microscope OLS4000
• Raith SEM
• Omicron STM/AFM System
• Tektronix Semiconductor Parameter Tester
• Spectrometer, Ocean Optics
• STN Probe Station

Metrology

• Fisba Interferometer
• Veeco Inferometer
• Zygo Inferometer
• Alpha Step Surface Profiler
• Interferometer, "Morti"

Networking and Fiber Optics

• End and Edge Polishing Systems
• Luna Optical Backscatter Reflectomete
• Luna Benchtop Optical Vector Analyzer
• Agilent All Parameter Test Station 81910A
• Movaz DWDM
• EXFO Optical Time Domain Reflectometer

Fusion Splicing:

• Fusion Splicer-Ericsson
• Fusion Splicer-Fujikura FSM 20PM
• Fusion Splicer-Fujikura FSM 40S

Fiber Termination & Inspection:

• Optical Fiber Polishing Machine
• Seiko Fiber Polisher
• Westover Video Fiber Microscope
• Agilent All Parameter Test Station
• Norland Connect-Chek 6000

Fiber Lensing Polishing System:

• Ultrapol Fiber Lensing System

Fiber Alignment and Mounting:

• EXFO NanoRobot Alignment Sys FR-3000

Laser Facility

• Laser Facility Fiber Laser Modules
• Continum Nd YAG Laser
• Continum Panther Oscillator
• Continum Minilite II Nd YAG Laser
• Spectra-Physics Tsunami

Simulation and Modeling

• EM Photonic Workstation
• Rsoft
• FemLab
• FDTD