Rates List

Rates List

Date Modified: 16 February 2017

NOTE: Minimum of 1 Hour per each session, minute by minute after first hour.

Rates List

Tool

Academic Rate

Industrial/External Rates

Notes

General Cleanroom (Entrance Fee - per person)

$30/day

$60/day

5 Day Cap/Calendar Month

STS ICP Etching (Si, Oxide, III/V)

$40/hr

$80/hr

One Hour Minimum Charge.

STS PECVD (Si02, Si3N4, Oxynitirde

$40/hr

$80/hr

One Hour Minimum Charge.

Solaris RTA Thermal Annealer

$20/hr

$40/hr

One Hour Minimum Charge.

AJA Sputtering

$30/hr

$60/hr

Noble Metals Extra Charge (Au, Pt, Ag)

Lesker E-Beam Evaproator

$30/hr

$60/hr

Noble metals extra charge (Au ,Pt, Ag)

   

 

 

Raith E-Beam System (Writing & Imaging)

$40/hr

$80/hr

One Hour Minimum Charge.

Qunitel 4000 Mask Aligner

$35/hr

$70/hr

One Hour Minimum.*

K&S Wire Bonder

$20/hr

$40/hr

One Hour Minimum Charge.

Loomis Scribe & Break Tool

$20/hr

$40/hr

One Hour Minimum Charge.

MicroAutomation 1100 Dicing Saw

$30/hr

$60/hr

One Hour Minimum Charge.**

Fintech Flip Chip Bonder

$20/hr

$40/hr

One Hour Minimum Charge.

K&S Digital Wedge Bonding System

$20/hr

$40/hr

One Hour Minimum Charge.

PANalytical X-Ray Diffractometer (XRD)

$25/hr

$50/hr

One Hour Minimum Charge.

JEOL 6400 SEM with EDAX

$40/hr

$80/hr

One Hour Minimum Charge.

Dimension 3100 NanoScope AFM

$20/hr

$40/hr

One Hour Minimum Charge.***

Olympus 3D Confocual Microscope

$15/hr

$30/hr

One Hour Minimum Charge.

VASE Spectroscopic Ellipsometer

$20/hr

$40/hr

One Hour Minimum Charge.

Staff Assistance/Admin Support/ Technical Consultation

$60/hr

$120/hr

N/A

 

* Qunitel 4000 Mask Aligner - Exotic Resist Extra Charge.
** MicroAutomation 1100 Dicing Saw - Special Blades for Exotic Materials Extra.

*** Dimension 3100 NanoScope AFM - Excessive Probe Usage Extra Charge.