| Standard Chuck |
Maximum RPM* |
Process Chamber |
Overall Size |
| 50 - 150 mm - vacuum |
8000 |
Ø8.5" (22 cm) |
Ø9" (23 cm) |
The spin processor housing has been machined from solid virgin grade materials which do not degrade or generate particles. The bowl-shaped interior forces fluid downward where it is routed directly to the rear drain. The upper plenum closes inside the base providing an overlapping seal. A proprietary motor seal protects the motor and control electronics from chemical contamination. This unique seal has proven to be sub-micron particle-free during field testing. Nitrogen purged process chamber is standard.