Standard Chuck	Maximum RPM*	Process Chamber	Overall Size
50 - 150 mm - vacuum	8000	Ø8.5" (22 cm)	Ø9" (23 cm)

The spin processor housing has been machined from solid virgin grade materials which do not degrade or generate particles. The bowl-shaped interior forces fluid downward where it is routed directly to the rear drain. The upper plenum closes inside the base providing an overlapping seal.  A proprietary motor seal protects the motor and control electronics from chemical contamination. This unique seal has proven to be sub-micron particle-free during field testing. Nitrogen purged process chamber is standard.