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Lithography |
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Raith 150 E-beam Lithography System
Laurell Spin Processors*
Quintel Contact Mask Alignment System*
Molecular Imprint Nanoimprint System*
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Materials Deposition and Etching |
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Rapid Thermal Process System
Omicron STM/AFM System
AJA Ion Milling System
AJA Sputtering Tool
ICP Compound Semiconductor Etch System
ICP Dielectric Etch System*
ICP Deep Silicon Etch System*
PECVD*
MOCVD
Microautomation Dicing Saw*
Evaporator*
Flip-chip Bonder*
Supercritical Drying Station*
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Metrology |
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Alpha Step Surface Profiler
X-Ray Interferometer
Zygo 4" Interferometer
Veeco General Purpose Phase Shifting Interferometer
Fisba-Optik Micro Interferometer
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Clean Room Basic Operations
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Imaging and Characterization |
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Z-scan Apparatus
Nano Alignment Systems
JEOL Scanning Electron Microscope
Veeco Scanning Probe Microscope
Tektronix Semiconductor Parameter Tester
Woolam Spectroscopic Ellipsometer
Veeco Nanoscope IV SPM Control Station
Spectrometers and Microscopes
STN Probe Station
Cathodoluminescence
EDAX
Deep Level Transient Spectroscopy
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Networking and Fiber Optics |
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Fujikura Fusion Splicer
Movaz DWDM
Optellios Fusion Splicer
Agilent Optical Spectrum Analyzer
Luna Optical Backscatter Reflectometer
Opotek Tunable Laser System
Melles Griot Bookends with Internal Piezos
Optellios Motion Controller Plus
End and Edge Polishing Systems
Fiber Lensing Polishing System
Burleigh Photonics Alignment System
Luna Benchtop Optical Vector Analyzer
Agilent All Parameter Test Station 81910A
Newport Ultra Short Laser Pulse Measurement System
Tektronix Oscilloscopes
EXFO Optical Time Domain Reflectometer
Exera Fiber Splicing Kit Heat Oven
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Laser Facility |
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Fiber Laser Modules
Continuum Pulsed Q-Switched ND Yag Laser
Research Grade Optical Tables
Excel Yag Laser Opotic System
Femtosecond Laser System
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Simulation and Modeling |
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EM Premier Workstation
Rsoft
FemLab
FDTD |
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*Near Future Capabilities
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